@inproceedings{91adb8ca786249269412d6af484cd08a,
title = "Fabrication of 3-D microreactor structures embedded in photosensitive glass by femtosecond laser",
abstract = "We have fabricated 3-D microreactor structures embedded in photosensitive glass by femtosecond laser direct writing followed by heat treatment and chemical etching in HF solution. The etching condition has been optimized for getting higher resolution. This technique was applied for manufacturing microfluidic structures containing microvalves which controlled the direction of reagent flow. This technique would be very attractive for rapid prototyping of micro-total-analysis systems.",
author = "M. Masuda and K. Sugioka and Y. Cheng and T. Hongo and K. Shihoyama and H. Takai and I. Miyamoto and K. Midorikawa",
note = "Publisher Copyright: {\textcopyright} 2003 Japan Soc. of Applied.; International Microprocesses and Nanotechnology Conference, MNC 2003 ; Conference date: 29-10-2003 Through 31-10-2003",
year = "2003",
doi = "10.1109/IMNC.2003.1268706",
language = "英语",
series = "Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "198--199",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003",
address = "美国",
}