Fabrication and dynamic measurement of micromechanical variable optical attenuator

Hui Bing Mao, Chang Li Yang, Pei Sheng Xin, De Yan Peng, Zi Qiang Zhu, Zong Sheng Lai

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)9
Number of pages1
JournalBandaoti Guangdian/Semiconductor Optoelectronics
Volume25
Issue number1
StatePublished - Feb 2004

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