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Fabrication and dynamic measurement of micromechanical variable optical attenuator

  • Hui Bing Mao
  • , Chang Li Yang
  • , Pei Sheng Xin
  • , De Yan Peng
  • , Zi Qiang Zhu
  • , Zong Sheng Lai

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)9
Number of pages1
JournalBandaoti Guangdian/Semiconductor Optoelectronics
Volume25
Issue number1
StatePublished - Feb 2004

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