Abstract
Porous germanium films with good adhesion to the substrate were produced by annealing GeO2 ceramic films in H2 atmosphere. The reduction of GeO2 started at the top of a film and resulted in a Ge layer with a highly porous surface. TEM and Raman measurements reveal small Ge crystallites at the top layer and a higher degree of crystallinity at the bottom part of the Ge film; visible photoluminescence was detected from the small crystallites. Porous Ge films exhibit high density of holes (1020 cm-3) and a maximum of Hall mobility at ∼225 K. Their p-type conductivity is dominated by the defect scattering mechanism.
| Original language | English |
|---|---|
| Article number | 065001 |
| Journal | Science and Technology of Advanced Materials |
| Volume | 10 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2009 |
| Externally published | Yes |
Keywords
- Germanium
- Porous structured film
- Semiconducting behavior
- Visible photoluminescence