@inproceedings{852e743a905a451cbc76dddd1777d4e5,
title = "Fabrication and applications of 3D large-sized and high-precision glass objects by ultrafast laser volume processing",
abstract = "Centimeter-sized and micrometer-precision glass structures with three-dimensional (3D) internal configurations have numerous potential applications in various fields of science and engineering, including high-throughput continuous-flow synthesis and biomimetic manufacturing. However, fabricating these structures using conventional microfabrication technologies remains a great challenge. We demonstrate our recent progress in advanced fabrication techniques for producing large, precise 3D glass objects through ultrafast laser volume processing. Our advancements include the creation of a 3D centimeter-scale glass hand with an encapsulated free-form glass microchannel, the development of low-loss optofluidic devices embedded in glass, the fabrication of long, compact glass microchannels with meter-scale lengths and straight-sided elliptical cross-sections, and the production of high aspect-ratio glass structures with large depths.",
keywords = "Bessel beam, Ultrafast laser microfabrication, glass microstructures, laser volume processing, laser-assisted etching, optofluidic devices",
author = "Jian Xu and Yunpeng Song and Jianping Yu and Aodong Zhang and Ya Cheng",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; Laser-based Micro- and Nanoprocessing XIX 2025 ; Conference date: 27-01-2025 Through 31-01-2025",
year = "2025",
doi = "10.1117/12.3040311",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Rainer Kling and Wilhelm Pfleging and Koji Sugioka",
booktitle = "Laser-based Micro- and Nanoprocessing XIX",
address = "美国",
}