@inproceedings{f063333dec6744dfbe82f032a4813cb4,
title = "Electron beam annealing for component optimization in Si-Sb-Te material",
abstract = "Electron beam (EB) annealing was used to acquire a reasonable and stable component in Si-Sb-Te material. For Si2Sb2Te5 phase change material, EB irradiation can induce phase separation and some regions have remained unchanged, which manifests as SixSb2Te3. The component of these steady areas was considered as reasonable in which Sb2Te3 is a stable compound. The crystallized Si3.3Sb2Te3 film after EB irradiation exhibited nano-scale grains with well-proportioned distribution and these grains were all with Sb2Te3 structure surrounded by amorphous. This unique structure brings fast phase change speed which is at least 12 times more rapidly than Si2Sb2Te5 material because it localizes atoms{\textquoteright} diffusion in a nano-area during reversible phase transition process.",
keywords = "Electron beam annealing, Microstructure, Phase change material, TEM",
author = "Yan Cheng and Song, \{San Nian\} and Zhang, \{Zhong Hua\} and Song, \{Zhi Tang\} and Bo Liu and Feng, \{Song Lin\} and Ze Zhang",
note = "Publisher Copyright: {\textcopyright} (2015) Trans Tech Publications, Switzerland.; Chinese Materials Congress, CMC 2014 ; Conference date: 04-07-2014 Through 07-07-2014",
year = "2015",
doi = "10.4028/www.scientific.net/MSF.815.44",
language = "英语",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "44--48",
editor = "Yafang Han and Zhongwei Gu and Qiang Fu",
booktitle = "Advanced Functional Materials",
address = "瑞士",
}