Electrical characterization of zinc oxide thin films by electrochemical capacitance-voltage profiling

X. Tang; A. Clauzonnier; H. I. Campbell; K. A. Prior; B. C. Cavenett

doi:10.1063/1.1695442

Electrical characterization of zinc oxide thin films by electrochemical capacitance-voltage profiling

X. Tang, A. Clauzonnier, H. I. Campbell, K. A. Prior, B. C. Cavenett

Heriot-Watt University

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

The electrical characterization of zinc oxide (ZnO) thin films was studied by using electrochemical capacitance-voltage (C-V) profiling. It was shown that ZnO forms a good Schottky contact with a 0.1 M ZnCl₂ electrolytic solution allowing the determination of carrier concentration profiles by C-V measurements. The chemical etching of the ZnO using a solution containing a high concentration of zinc ions was also discussed. It was determined that the dissolution number can vary, but was 3.6 over a range of sample doping levels away from the ZnO/sapphire interface.

Original language	English
Pages (from-to)	3043-3045
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	16
DOIs	https://doi.org/10.1063/1.1695442
State	Published - 19 Apr 2004
Externally published	Yes

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@article{ecd296ca4c2d476c9e6a1b014c069031,

title = "Electrical characterization of zinc oxide thin films by electrochemical capacitance-voltage profiling",

abstract = "The electrical characterization of zinc oxide (ZnO) thin films was studied by using electrochemical capacitance-voltage (C-V) profiling. It was shown that ZnO forms a good Schottky contact with a 0.1 M ZnCl2 electrolytic solution allowing the determination of carrier concentration profiles by C-V measurements. The chemical etching of the ZnO using a solution containing a high concentration of zinc ions was also discussed. It was determined that the dissolution number can vary, but was 3.6 over a range of sample doping levels away from the ZnO/sapphire interface.",

author = "X. Tang and A. Clauzonnier and Campbell, \{H. I.\} and Prior, \{K. A.\} and Cavenett, \{B. C.\}",

year = "2004",

month = apr,

day = "19",

doi = "10.1063/1.1695442",

language = "英语",

volume = "84",

pages = "3043--3045",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "16",

}

TY - JOUR

T1 - Electrical characterization of zinc oxide thin films by electrochemical capacitance-voltage profiling

AU - Tang, X.

AU - Clauzonnier, A.

AU - Campbell, H. I.

AU - Prior, K. A.

AU - Cavenett, B. C.

PY - 2004/4/19

Y1 - 2004/4/19

N2 - The electrical characterization of zinc oxide (ZnO) thin films was studied by using electrochemical capacitance-voltage (C-V) profiling. It was shown that ZnO forms a good Schottky contact with a 0.1 M ZnCl2 electrolytic solution allowing the determination of carrier concentration profiles by C-V measurements. The chemical etching of the ZnO using a solution containing a high concentration of zinc ions was also discussed. It was determined that the dissolution number can vary, but was 3.6 over a range of sample doping levels away from the ZnO/sapphire interface.

AB - The electrical characterization of zinc oxide (ZnO) thin films was studied by using electrochemical capacitance-voltage (C-V) profiling. It was shown that ZnO forms a good Schottky contact with a 0.1 M ZnCl2 electrolytic solution allowing the determination of carrier concentration profiles by C-V measurements. The chemical etching of the ZnO using a solution containing a high concentration of zinc ions was also discussed. It was determined that the dissolution number can vary, but was 3.6 over a range of sample doping levels away from the ZnO/sapphire interface.

UR - https://www.scopus.com/pages/publications/2442566424

U2 - 10.1063/1.1695442

DO - 10.1063/1.1695442

M3 - 文章

AN - SCOPUS:2442566424

SN - 0003-6951

VL - 84

SP - 3043

EP - 3045

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 16

ER -

Electrical characterization of zinc oxide thin films by electrochemical capacitance-voltage profiling

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