Abstract
The preparation of Bi2Ti2O7 thin films on planatized Pt/Ti/SiO2 substrates by metalorganic decomposition (MOD) technique was studied. Investigations show that the Pt/Bi2Ti 2O7/Pt capacitors had excellent insulating properties. The optical constants (n,k) of Bi2Ti2O7 thin films were obtained by spectroscopic ellisometric measurements. It was concluded that Bi2Ti2O7 thin films were applicable as metal-oxide-semiconductor devices.
| Original language | English |
|---|---|
| Pages (from-to) | 1214-1216 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 85 |
| Issue number | 7 |
| DOIs | |
| State | Published - 16 Aug 2004 |
| Externally published | Yes |