TY - JOUR
T1 - Effects of titanium content on properties of sol-gel silica-titania films via organically modified silane precursors
AU - Que, Wenxiu
AU - Sun, Z.
AU - Lam, Y. L.
AU - Chan, Y. C.
AU - Kam, C. H.
PY - 2001/2/21
Y1 - 2001/2/21
N2 - The effects of titanium content on the properties of silica-titania films by the sol-gel method using γ-glycidoxypropyltrimethoxysilane (GLYMO), tetraethoxysilane (TEOS) and tetrapropylorthotitanate (TPOT) as the starting materials have been investigated. Atomic force microscopy (AFM), ellipsometry, thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), Fourier transform infrared (FT-IR) spectroscopy, x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy have been used to investigate the optical and structural properties of the films. These results showed that crack-free and high transparency (in the visible and near infrared range) silica-titania films with a thickness of 0.75 μm could be obtained by a single spin-coating process after a heat treatment at 500°C. The hardness and Young's modulus of the films were also characterized by a nanoindenter and showed a linear dependence on the titanium content. Hardness as high as 9.0 GPa was achieved in a high titanium content film at a heat treatment temperature of 800°C.
AB - The effects of titanium content on the properties of silica-titania films by the sol-gel method using γ-glycidoxypropyltrimethoxysilane (GLYMO), tetraethoxysilane (TEOS) and tetrapropylorthotitanate (TPOT) as the starting materials have been investigated. Atomic force microscopy (AFM), ellipsometry, thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), Fourier transform infrared (FT-IR) spectroscopy, x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy have been used to investigate the optical and structural properties of the films. These results showed that crack-free and high transparency (in the visible and near infrared range) silica-titania films with a thickness of 0.75 μm could be obtained by a single spin-coating process after a heat treatment at 500°C. The hardness and Young's modulus of the films were also characterized by a nanoindenter and showed a linear dependence on the titanium content. Hardness as high as 9.0 GPa was achieved in a high titanium content film at a heat treatment temperature of 800°C.
UR - https://www.scopus.com/pages/publications/0035248933
U2 - 10.1088/0022-3727/34/4/305
DO - 10.1088/0022-3727/34/4/305
M3 - 文章
AN - SCOPUS:0035248933
SN - 0022-3727
VL - 34
SP - 471
EP - 476
JO - Journal of Physics D: Applied Physics
JF - Journal of Physics D: Applied Physics
IS - 4
ER -