Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films

Dawei Li; Hongbo Liu; Luqiu Chen; Yu Shen; Guangdi Feng; Shenglan Hao; Zhenzhong Yang; Qiuxiang Zhu; Ke Qu; Bobo Tian; Junhao Chu; Chungang Duan

doi:10.1063/5.0202159

Effects of electrodes on antiferroelectricity and fatigue endurance of Hf_0.2Zr_0.8O₂ thin films

Dawei Li, Hongbo Liu, Luqiu Chen, Yu Shen, Guangdi Feng, Shenglan Hao, Zhenzhong Yang, Qiuxiang Zhu, Ke Qu, Bobo Tian, Junhao Chu, Chungang Duan

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf_0.2Zr_0.8O₂ thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf_0.2Zr_0.8O₂|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

Original language	English
Article number	132903
Journal	Applied Physics Letters
Volume	124
Issue number	13
DOIs	https://doi.org/10.1063/5.0202159
State	Published - 25 Mar 2024

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title = "Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films",

abstract = "The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.",

author = "Dawei Li and Hongbo Liu and Luqiu Chen and Yu Shen and Guangdi Feng and Shenglan Hao and Zhenzhong Yang and Qiuxiang Zhu and Ke Qu and Bobo Tian and Junhao Chu and Chungang Duan",

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T1 - Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films

AU - Li, Dawei

AU - Liu, Hongbo

AU - Chen, Luqiu

AU - Shen, Yu

AU - Feng, Guangdi

AU - Hao, Shenglan

AU - Yang, Zhenzhong

AU - Zhu, Qiuxiang

AU - Qu, Ke

AU - Tian, Bobo

AU - Chu, Junhao

AU - Duan, Chungang

PY - 2024/3/25

Y1 - 2024/3/25

N2 - The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

AB - The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

UR - https://www.scopus.com/pages/publications/85189033399

U2 - 10.1063/5.0202159

DO - 10.1063/5.0202159

M3 - 文章

AN - SCOPUS:85189033399

SN - 0003-6951

VL - 124

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 132903

ER -

Effects of electrodes on antiferroelectricity and fatigue endurance of Hf_0.2Zr_0.8O₂ thin films

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