Effect of rapid thermal annealing on property of nano-SnO2 thin film

  • Su Mei Qin*
  • , Zi Yang Tong
  • , Ming Guo
  • , Hong Mei Deng
  • , Ping Xiong Yang
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

By using SnCl2 2H2O as main materials and ethanol as solvent, nano-SnO2 thin films were prepared by sol-gel technique with rapid thermal annealing (RTA). The effect of rapid thermal annealing (RTA) on property of nano-SnO2 thin film was explored. The size of grains, the microstructure, the morphology and the optical properties of nano-SnO2 thin films were characterized by XRD, SEM, PL and FT-IR. The results indicate that the optical property and the grain-size, the microstructure, and the morphology of the samples change evidently with different temperature of RTA.

Original languageEnglish
Pages (from-to)101-104
Number of pages4
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume27
Issue number2
DOIs
StatePublished - Apr 2008

Keywords

  • Rapid thermal annealing (RTA)
  • SnO
  • Sol-gel

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