Abstract
Lead zirconate titanate PbZr0.50Ti0.50O3 (PZT) ferroelectric thin films were successfully deposited on Pt(111)/Ti/SiO2/Si substrates by a modified sol-gel method using zirconium nitrate as a substitute for the conventional zirconium alkoxide. The precursor solutions were hydrolyzed with different H2O/Pb ratios. The effect of hydrolysis ratios of the solution on the microstructure for the PZT thin films were investigated via X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The XRD results show that the PZT films exhibit (111)-orientation and the degree of the (111)-orientation decreases with the increase of hydrolysis ratio. These results indicate that the ferroelectric behavior can be improved by an appropriate choice of H2O/Pb ratio.
| Original language | English |
|---|---|
| Pages (from-to) | 269-274 |
| Number of pages | 6 |
| Journal | Journal of Crystal Growth |
| Volume | 233 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - Nov 2001 |
| Externally published | Yes |
Keywords
- A1. X-ray diffraction
- B1. perovskites
- B2. ferroelectric materials