Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

Zhangyi Cao; Zhuo Sun; Pingsheng Guo; Yiwei Chen

doi:10.1007/s11706-007-0017-x

Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

Zhangyi Cao^*
, Zhuo Sun
, Pingsheng Guo
, Yiwei Chen

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and a Raman spectrometer, respectively. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter per minute), the yield and the diameter of CNTs increase. Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate.

Original language	English
Pages (from-to)	92-96
Number of pages	5
Journal	Frontiers of Materials Science in China
Volume	1
Issue number	1
DOIs	https://doi.org/10.1007/s11706-007-0017-x
State	Published - Feb 2007

Keywords

Carbon nanotubes
Chemical vapor deposition
Raman spectra
Scanning electron microscopy
Transmitting electron microscopy

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10.1007/s11706-007-0017-x

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title = "Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition",

abstract = "Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and a Raman spectrometer, respectively. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter per minute), the yield and the diameter of CNTs increase. Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate.",

keywords = "Carbon nanotubes, Chemical vapor deposition, Raman spectra, Scanning electron microscopy, Transmitting electron microscopy",

author = "Zhangyi Cao and Zhuo Sun and Pingsheng Guo and Yiwei Chen",

year = "2007",

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doi = "10.1007/s11706-007-0017-x",

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T1 - Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

AU - Cao, Zhangyi

AU - Sun, Zhuo

AU - Guo, Pingsheng

AU - Chen, Yiwei

PY - 2007/2

Y1 - 2007/2

N2 - Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and a Raman spectrometer, respectively. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter per minute), the yield and the diameter of CNTs increase. Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate.

AB - Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and a Raman spectrometer, respectively. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter per minute), the yield and the diameter of CNTs increase. Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate.

KW - Carbon nanotubes

KW - Chemical vapor deposition

KW - Raman spectra

KW - Scanning electron microscopy

KW - Transmitting electron microscopy

UR - https://www.scopus.com/pages/publications/34250667384

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DO - 10.1007/s11706-007-0017-x

M3 - 文章

AN - SCOPUS:34250667384

SN - 1673-7377

VL - 1

SP - 92

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JO - Frontiers of Materials Science in China

JF - Frontiers of Materials Science in China

IS - 1

ER -

Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

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Keywords

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