Effect of acetic acid/water ratio on the microstructure and properties of LaNiO3 thin films by metal organic solution deposition

Yuan Yuan Zhang*, Xiao Dong Tang, Gen Shui Wang, Xian Lin Dong

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Highly (100)-oriented LaNiO3 (LNO) thin films were prepared on p-type Si (100) substrates by metal organic solution deposition (MOSD). The LNO thin films were driven by series precursor solutions with different ratio of acetic acid to deionized water (Raaw) and pH values. The dependences of viscosity, pH value and the thermal property of the gel-derived powders of the precursor solution on Raaw values were systematically investigated. AFM images showed that Raaw can dramatically influence the surface roughness. When Raaw changed from 7:1 to 1:1, the surface roughness decreased from 3.695 nm to 1.488 nm. The resistivities of all the films are less than 2.1×10-3Ω·cm. It shows that the precursor solution has strong effect on the microstructure of the thin films and relatively slight effect on the resistivity.

Original languageEnglish
Title of host publicationAdvanced Functional Materials
EditorsYafang Han, Zhongwei Gu, Qiang Fu
PublisherTrans Tech Publications Ltd
Pages89-93
Number of pages5
ISBN (Electronic)9783038353942
DOIs
StatePublished - 2015
EventChinese Materials Congress, CMC 2014 - Chengdu, China
Duration: 4 Jul 20147 Jul 2014

Publication series

NameMaterials Science Forum
Volume815
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

ConferenceChinese Materials Congress, CMC 2014
Country/TerritoryChina
CityChengdu
Period4/07/147/07/14

Keywords

  • Electrode
  • LaNiO
  • Perovskite

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