Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

Fei He; Ya Cheng; Zhizhan Xu; Yang Liao; Jian Xu; Haiyi Sun; Chen Wang; Zenghui Zhou; Koji Sugioka; Katsumi Midorikawa; Yonghao Xu; Xianfeng Chen

doi:10.1364/OL.35.000282

Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

Fei He^*
, Ya Cheng
, Zhizhan Xu
, Yang Liao
, Jian Xu
, Haiyi Sun
, Chen Wang
, Zenghui Zhou
, Koji Sugioka
, Katsumi Midorikawa
, Yonghao Xu
, Xianfeng Chen

^*Corresponding author for this work

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
RIKEN
Shanghai Jiao Tong University

Research output: Contribution to journal › Article › peer-review

91 Scopus citations

Abstract

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

Original language	English
Pages (from-to)	282-284
Number of pages	3
Journal	Optics Letters
Volume	35
Issue number	3
DOIs	https://doi.org/10.1364/OL.35.000282
State	Published - 1 Feb 2010
Externally published	Yes

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10.1364/OL.35.000282

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abstract = "We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.",

author = "Fei He and Ya Cheng and Zhizhan Xu and Yang Liao and Jian Xu and Haiyi Sun and Chen Wang and Zenghui Zhou and Koji Sugioka and Katsumi Midorikawa and Yonghao Xu and Xianfeng Chen",

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TY - JOUR

T1 - Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

AU - He, Fei

AU - Cheng, Ya

AU - Xu, Zhizhan

AU - Liao, Yang

AU - Xu, Jian

AU - Sun, Haiyi

AU - Wang, Chen

AU - Zhou, Zenghui

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

AU - Xu, Yonghao

AU - Chen, Xianfeng

PY - 2010/2/1

Y1 - 2010/2/1

N2 - We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

AB - We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

UR - https://www.scopus.com/pages/publications/75749145114

U2 - 10.1364/OL.35.000282

DO - 10.1364/OL.35.000282

M3 - 文章

C2 - 20125695

AN - SCOPUS:75749145114

SN - 0146-9592

VL - 35

SP - 282

EP - 284

JO - Optics Letters

JF - Optics Letters

IS - 3

ER -

Direct fabrication of homogeneous microfiuidic channels embedded in fused silica using a femtosecond laser

Abstract

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