Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

M. Masuda; K. Sugioka; Y. Cheng; T. Hongo; K. Shihoyama; H. Takai; I. Miyamoto; K. Midorikawa

doi:10.1007/s00339-003-2447-3

Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

M. Masuda, K. Sugioka^*, Y. Cheng, T. Hongo, K. Shihoyama, H. Takai, I. Miyamoto, K. Midorikawa

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

86 Scopus citations

Abstract

We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.

Original language	English
Pages (from-to)	1029-1032
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	78
Issue number	7
DOIs	https://doi.org/10.1007/s00339-003-2447-3
State	Published - Apr 2004
Externally published	Yes

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title = "Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application",

abstract = "We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.",

author = "M. Masuda and K. Sugioka and Y. Cheng and T. Hongo and K. Shihoyama and H. Takai and I. Miyamoto and K. Midorikawa",

year = "2004",

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AU - Masuda, M.

AU - Sugioka, K.

AU - Cheng, Y.

AU - Hongo, T.

AU - Shihoyama, K.

AU - Takai, H.

AU - Miyamoto, I.

AU - Midorikawa, K.

PY - 2004/4

Y1 - 2004/4

N2 - We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.

AB - We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.

UR - https://www.scopus.com/pages/publications/1842586802

U2 - 10.1007/s00339-003-2447-3

DO - 10.1007/s00339-003-2447-3

M3 - 文章

AN - SCOPUS:1842586802

SN - 0947-8396

VL - 78

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JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 7

ER -

Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

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