Abstract
One of the key problems of nano-structured materials for electronic device applications in micro-/ nano-sensors and circuits is to align and manipulate them to the preset locations. With several home-made electrode pairs, we succeeded in manipulating the SiO2 micro-/nano-particles along the electric field and deposited them across the gaps between two electrodes. It is proven a helpful experiment to precisely assemble of the nano-structures. A relative humidity sensor, using the dielectrophoretically located self-grown ZnO nano-materials as sensing elements, had been fabricated and the sensing properties had been tested. It confirms the dielectrophoresis can fulfill the application of nano-materials in the field of sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 17-22 |
| Number of pages | 6 |
| Journal | Chinese Journal of Sensors and Actuators |
| Volume | 21 |
| Issue number | 1 |
| State | Published - Jan 2008 |
Keywords
- Dielectrophoresis
- Micro-/nano-sensor
- Precise assembly
- Relative humidity
- ZnO nanostructure