@inproceedings{017f0fe3aad1412a97123dbdcba8815b,
title = "Development of solid-based modeling system for surface micromachined MEMS",
abstract = "Although a lot of CAD systems and tools have developed for MEMS, there does not appear to be a means for solid-based modeling. In this paper, a modeling system based on three-dimensional solid model for surface micromachined devices is developed. The system consists of three main modules: fast process simulation and material-based process simulation; automatic mask synthesis based on solid model; collaborative modeling to support design refinement. Based on a solid modeling core ACIS, the system is implemented in VC++ and some test results are given. The system helps MEMS designers work in a more intuitive mode.",
keywords = "CAD, Collaborative modeling, MEMS, Surface micromachining",
author = "Jianhua Li and Yusheng Liu and Hao Ling and Weibin Guo and Gaoqi He",
year = "2011",
doi = "10.1109/ICCRD.2011.5764136",
language = "英语",
isbn = "9781612848372",
series = "ICCRD2011 - 2011 3rd International Conference on Computer Research and Development",
pages = "297--301",
booktitle = "ICCRD2011 - 2011 3rd International Conference on Computer Research and Development",
note = "2011 3rd International Conference on Computer Research and Development, ICCRD 2011 ; Conference date: 11-03-2011 Through 15-03-2011",
}