Development of infrared spectroscopic ellipsometer by synchronous rotation of the polarizer and analyzer

  • Zhiming Huang*
  • , Shirong Jin
  • , Shiwei Chen
  • , Minhui Chen
  • , Guoliang Shi
  • , Liangyao Chen
  • , Junhao Chu
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

A type of infrared spectroscopic ellipsometer was designed and constructed to study the optical properties of materials within the 2.5-12.5 μm wavelength range. The incident angle was continuously variable between 20 ° and 90 °. The system operations, including data acquisition and reduction, preamplifier gain control, incident angle, wavelength setting and scanning were fully and automatically controlled by a computer. The reflectivity of Au and refractive index of GaAs bulk material, measured by the infrared ellipsometer, were given as an example, and the comparison of the results to those of other methods was also given. The experimental skill and main system errors were discussed.

Original languageEnglish
Pages (from-to)321-326
Number of pages6
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume17
Issue number4
StatePublished - 1998
Externally publishedYes

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