Abstract
A type of infrared spectroscopic ellipsometer was designed and constructed to study the optical properties of materials within the 2.5-12.5 μm wavelength range. The incident angle was continuously variable between 20 ° and 90 °. The system operations, including data acquisition and reduction, preamplifier gain control, incident angle, wavelength setting and scanning were fully and automatically controlled by a computer. The reflectivity of Au and refractive index of GaAs bulk material, measured by the infrared ellipsometer, were given as an example, and the comparison of the results to those of other methods was also given. The experimental skill and main system errors were discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 321-326 |
| Number of pages | 6 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 17 |
| Issue number | 4 |
| State | Published - 1998 |
| Externally published | Yes |