Abstract
A type of infrared spectroscopic ellipsometer was designed and constructed to study the optical properties of materials in the 2.5-12.5μm wavelength range. The incident angle was continuously variable between 20° and 90°. The system operations, including data acquisition and reduction, preamplifier gain control, incident angle, wavelength setting and scanning were fully and automatically controlled by a computer. The reflectivity of Au and refractive index of GaAs bulk material, measured by the infrared ellipsometer, were given as an example, and a comparison of the results with other methods was also given. The experimental skill and main system errors were discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 326 |
| Number of pages | 1 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 17 |
| Issue number | 5 |
| State | Published - 1998 |
| Externally published | Yes |
Keywords
- Ellipsometric parameter
- Infrared spectroscopic ellipsometer
- Optical constant