Development of bolometer detector array made of Mn-Co-Ni-Othin films

Lei Bo Zhang; Yun Hou; Wei Zhou; Zhi Ming Huang; Jun Hao Chu

doi:10.3724/SP.J.1010.2014.00359

Development of bolometer detector array made of Mn-Co-Ni-Othin films

Lei Bo Zhang^*
, Yun Hou
, Wei Zhou
, Zhi Ming Huang
, Jun Hao Chu

^*Corresponding author for this work

CAS - Shanghai Institute of Technical Physics

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K^-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×10⁷cmHz^1/2/W respectively at bias voltage of ±15 V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.

Original language	English
Pages (from-to)	359-363
Number of pages	5
Journal	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume	33
Issue number	4
DOIs	https://doi.org/10.3724/SP.J.1010.2014.00359
State	Published - 1 Aug 2014
Externally published	Yes

Keywords

Bolometer material
Linear focal plane array
MnCoNiOthin film

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10.3724/SP.J.1010.2014.00359

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title = "Development of bolometer detector array made of Mn-Co-Ni-Othin films",

abstract = "The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8\% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15 V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9\%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.",

keywords = "Bolometer material, Linear focal plane array, MnCoNiOthin film",

author = "Zhang, \{Lei Bo\} and Yun Hou and Wei Zhou and Huang, \{Zhi Ming\} and Chu, \{Jun Hao\}",

year = "2014",

month = aug,

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doi = "10.3724/SP.J.1010.2014.00359",

language = "英语",

volume = "33",

pages = "359--363",

journal = "Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves",

issn = "1001-9014",

publisher = "Chinese Optical Society",

number = "4",

}

TY - JOUR

T1 - Development of bolometer detector array made of Mn-Co-Ni-Othin films

AU - Zhang, Lei Bo

AU - Hou, Yun

AU - Zhou, Wei

AU - Huang, Zhi Ming

AU - Chu, Jun Hao

PY - 2014/8/1

Y1 - 2014/8/1

N2 - The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15 V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.

AB - The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15 V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.

KW - Bolometer material

KW - Linear focal plane array

KW - MnCoNiOthin film

UR - https://www.scopus.com/pages/publications/84907198995

U2 - 10.3724/SP.J.1010.2014.00359

DO - 10.3724/SP.J.1010.2014.00359

M3 - 文章

AN - SCOPUS:84907198995

SN - 1001-9014

VL - 33

SP - 359

EP - 363

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 4

ER -

Development of bolometer detector array made of Mn-Co-Ni-Othin films

Abstract

Keywords

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