TY - GEN
T1 - DC and RF Small Signal Modeling of 28nm Planar MOSFET
AU - Chen, Siyu
AU - Sun, Yabin
AU - Li, Xiaojin
AU - Shi, Yanling
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - In this paper, DC model and RF small signal model of 28nm planar MOSFET are proposed respectively. First, using the industry standard model, the Berkeley Short-Channel IGFET Model (BSIM), a DC global model of the MOSFET is established. An RF small-signal model up to 100 GHz is also obtained accurately. A nonlinear rational function is fitted to obtain the parameters. Due to the physical limitations of the mathematical model, the RF small-signal model is fitted with the RF quality factor. The analysis of the parasitic parameter variations at different voltages is performed. Good agreement is obtained between the equivalent circuit-modeled and TCAD-simulated data, which verifies the reliability of the model.
AB - In this paper, DC model and RF small signal model of 28nm planar MOSFET are proposed respectively. First, using the industry standard model, the Berkeley Short-Channel IGFET Model (BSIM), a DC global model of the MOSFET is established. An RF small-signal model up to 100 GHz is also obtained accurately. A nonlinear rational function is fitted to obtain the parameters. Due to the physical limitations of the mathematical model, the RF small-signal model is fitted with the RF quality factor. The analysis of the parasitic parameter variations at different voltages is performed. Good agreement is obtained between the equivalent circuit-modeled and TCAD-simulated data, which verifies the reliability of the model.
KW - 28nm planar MOSFET
KW - global model
KW - parameter extraction
KW - small-signal model
UR - https://www.scopus.com/pages/publications/85182746840
U2 - 10.1109/ICICM59499.2023.10365754
DO - 10.1109/ICICM59499.2023.10365754
M3 - 会议稿件
AN - SCOPUS:85182746840
T3 - 2023 8th International Conference on Integrated Circuits and Microsystems, ICICM 2023
SP - 603
EP - 606
BT - 2023 8th International Conference on Integrated Circuits and Microsystems, ICICM 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 8th International Conference on Integrated Circuits and Microsystems, ICICM 2023
Y2 - 20 October 2023 through 23 October 2023
ER -