Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser

  • Ya Cheng*
  • , Koji Sugioka
  • , Katsumi Midorikawa
  • , Masashi Masuda
  • , Koichi Toyoda
  • , Masako Kawachi
  • , Kazuhiko Shihoyama
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

317 Scopus citations

Abstract

Theoretical and experimental investigations have been made of the three-dimensional microchannel fabrication of photostructurable glass by use of a femtosecond (fs) laser. Generally, a microchannel fabricated inside glass by the scanning focal spot of a fs laser perpendicular to the direction of laser propagation assumes an elliptical shape with a cross section of large aspect ratio. We demonstrate that one can greatly reduce the aspect ratio merely by inserting a slit, which is oriented parallel to the laser's scanning direction, before the focusing lens. Computer simulations show that a more symmetrical pattern is obtained in the vicinity of the focal point with the help of such a slit, owing essentially to a diffraction effect.

Original languageEnglish
Pages (from-to)55-57
Number of pages3
JournalOptics Letters
Volume28
Issue number1
DOIs
StatePublished - 1 Jan 2003
Externally publishedYes

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