Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams

We reported three types of complex micro/nanostructures on 6H-SiC crystal induced by the interferences of three femtosecond laser beams by arranging three types of laser polarization combinations. The micro/ nanostructures are composed of two parts: two-dimensional long-periodic micropatterns determined by the interferential intensity pattern and short-periodic nanopatterns determined by the interferential polarization pattern. Theoretical calculation indicates that the different polarization combinations will lead to a distinct complex interferential polarization pattern and intensity pattern, and they accord well with the experimental results.