Abstract
The crystallization of Ge-Sb-Te and Si-Sb-Te phase-change materials has been characterized by in situ time-dependent resistance measurement and transmission electron microscopy. Although silicon has various properties that are similar to those of germanium, Si-Sb-Te and Ge-Sb-Te crystallize via different processes. Si-Sb-Te has a complex structure (mainly hexagonal) while Ge-Sb-Te has a simple face-centered cubic structure when annealed at 433 K for several hours.
| Original language | English |
|---|---|
| Pages (from-to) | 977-980 |
| Number of pages | 4 |
| Journal | Scripta Materialia |
| Volume | 58 |
| Issue number | 11 |
| DOIs | |
| State | Published - Jun 2008 |
| Externally published | Yes |
Keywords
- GeSbTe
- Phase-change material
- Phase-change memory
- SiSbTe