Characterization of the crystallization behaviors in the PbTiO₃ thin films on Si substrates by an infrared spectroscopy technique

PbTiO₃ thin films on silicon substrates derived from a modified sol-gel technique are characterized by IR reflectance spectroscopy for the first time. Seven infrared (IR) reflectance peaks modes have been observed in the crystallized perovskite PbTiO₃ thin films and are assigned to the corresponding phonon modes. Comparisons between the IR reflectance spectra of PbTiO₃ thin films obtained by different annealing processes, i.e., rapid thermal annealing (RTA) and conventional thermal annealing (CTA), have also been carried out. It is observed that the frequencies of most peaks in the RTA-derived PbTiO₃ films are lower than that in the CTA-derived films.