Characterization of FeSix film by codeposition on β-FeSi2 template

Xiangdong Chen; Lianwei Wang; Qinwo Shen; Rushan Ni; Chenglu Lin

doi:10.1063/1.116348

Characterization of FeSix film by codeposition on β-FeSi2 template

Xiangdong Chen^*
, Lianwei Wang
, Qinwo Shen
, Rushan Ni
, Chenglu Lin

^*Corresponding author for this work

CAS - Shanghai Institute of Microsystem and Information Technology

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

We report the characterization of FeSix (x∼3) thin film prepared by simultaneous electron beam evaporation of Fe and Si onto a β-FeSi2 template at 250°C. The in situ reflective high energy electron diffraction observation and ex situ cross-section transmission electron microscope characterization of the as-deposited film imply that the as-deposited film has the structure similar to that of β-FeSi2. But the spreading resistance measurement shows that the film is metallic. Auger electron spectroscopy suggests that the chemical environment of Fe atoms in the as-deposited FeSix film is different from that in the annealed film (β-FeSi2 film). We explain this paradox by assuming that the as-deposited film has the crystal lattice similar to β-FeSi2 but with ingredient disorder due to the low transport viscosity of Fe and Si atoms at this temperature.

Original language	English
Pages (from-to)	2858-2860
Number of pages	3
Journal	Applied Physics Letters
Volume	68
Issue number	20
DOIs	https://doi.org/10.1063/1.116348
State	Published - 1996
Externally published	Yes

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title = "Characterization of FeSix film by codeposition on β-FeSi2 template",

abstract = "We report the characterization of FeSix (x∼3) thin film prepared by simultaneous electron beam evaporation of Fe and Si onto a β-FeSi2 template at 250°C. The in situ reflective high energy electron diffraction observation and ex situ cross-section transmission electron microscope characterization of the as-deposited film imply that the as-deposited film has the structure similar to that of β-FeSi2. But the spreading resistance measurement shows that the film is metallic. Auger electron spectroscopy suggests that the chemical environment of Fe atoms in the as-deposited FeSix film is different from that in the annealed film (β-FeSi2 film). We explain this paradox by assuming that the as-deposited film has the crystal lattice similar to β-FeSi2 but with ingredient disorder due to the low transport viscosity of Fe and Si atoms at this temperature.",

author = "Xiangdong Chen and Lianwei Wang and Qinwo Shen and Rushan Ni and Chenglu Lin",

year = "1996",

doi = "10.1063/1.116348",

language = "英语",

volume = "68",

pages = "2858--2860",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "20",

}

TY - JOUR

T1 - Characterization of FeSix film by codeposition on β-FeSi2 template

AU - Chen, Xiangdong

AU - Wang, Lianwei

AU - Shen, Qinwo

AU - Ni, Rushan

AU - Lin, Chenglu

PY - 1996

Y1 - 1996

N2 - We report the characterization of FeSix (x∼3) thin film prepared by simultaneous electron beam evaporation of Fe and Si onto a β-FeSi2 template at 250°C. The in situ reflective high energy electron diffraction observation and ex situ cross-section transmission electron microscope characterization of the as-deposited film imply that the as-deposited film has the structure similar to that of β-FeSi2. But the spreading resistance measurement shows that the film is metallic. Auger electron spectroscopy suggests that the chemical environment of Fe atoms in the as-deposited FeSix film is different from that in the annealed film (β-FeSi2 film). We explain this paradox by assuming that the as-deposited film has the crystal lattice similar to β-FeSi2 but with ingredient disorder due to the low transport viscosity of Fe and Si atoms at this temperature.

AB - We report the characterization of FeSix (x∼3) thin film prepared by simultaneous electron beam evaporation of Fe and Si onto a β-FeSi2 template at 250°C. The in situ reflective high energy electron diffraction observation and ex situ cross-section transmission electron microscope characterization of the as-deposited film imply that the as-deposited film has the structure similar to that of β-FeSi2. But the spreading resistance measurement shows that the film is metallic. Auger electron spectroscopy suggests that the chemical environment of Fe atoms in the as-deposited FeSix film is different from that in the annealed film (β-FeSi2 film). We explain this paradox by assuming that the as-deposited film has the crystal lattice similar to β-FeSi2 but with ingredient disorder due to the low transport viscosity of Fe and Si atoms at this temperature.

UR - https://www.scopus.com/pages/publications/0011198646

U2 - 10.1063/1.116348

DO - 10.1063/1.116348

M3 - 文章

AN - SCOPUS:0011198646

SN - 0003-6951

VL - 68

SP - 2858

EP - 2860

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 20

ER -

Characterization of FeSix film by codeposition on β-FeSi2 template

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