Carbon layer application in phase change memory to reduce power consumption and atomic migration

  • Kun Ren
  • , Yan Cheng*
  • , Xin Chen
  • , Keyuan Ding
  • , Shilong Lv
  • , Weijun Yin
  • , Xiaohui Guo
  • , Zhenguo Ji
  • , Zhitang Song
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Phase change memory (PCM) cells with carbon buffer layer have been fabricated. Carbon layer reduced the heat dissipation through upper electrode, increasing the energy efficiency of PCM, reducing the power consumption. The element distribution in PCM cell after 3 × 105 cycles proved that the carbon layer has successfully prevented atoms diffusion. After carbon layer being applied, the local high temperature during RESET in phase change material has been lowered. Hence, the higher viscosity at lower temperature has reduced atomic migration, beneficial to a good endurance.

Original languageEnglish
Pages (from-to)52-55
Number of pages4
JournalMaterials Letters
Volume206
DOIs
StatePublished - 1 Nov 2017
Externally publishedYes

Keywords

  • Carbon materials
  • Phase change memory
  • Physical vapor deposition
  • Thermal analysis

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