Capacitive humidity sensors based on Ni/SiNWs nanocomposites

Bairui Tao; Jian Zhang; Fengjuan Miao; Huilin Li; Lijuan Wan; Yiting Wang

doi:10.1016/j.snb.2008.10.039

Capacitive humidity sensors based on Ni/SiNWs nanocomposites

Bairui Tao
, Jian Zhang^*
, Fengjuan Miao
, Huilin Li
, Lijuan Wan
, Yiting Wang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Abstract

In this paper, Ni/SiNWs nanocomposites, constructed by wet chemical etching silicon nanowires (SiNWs) coated with electroless plating nickel, were prepared and studied for the detection of humidity. The Ni/SiNWs nanocomposites were annealed at different temperatures under argon atmosphere to optimize the sensitive properties and characterized by Energy Dispersive Spectroscopy (EDS) and Scanning Electron Microscopy (SEM) to obtain the information on the structural and morphological properties. The capacitive humidity sensing characteristics have been investigated with the Ni/SiNWs nanocomposites as the sensitive material. It is concluded that the humidity sensor based on as-synthesized nanocomposites exhibited high sensitivity and fast response time due to its unique large surface-to-volume ratio and electrical properties. The results demonstrated that the Ni/SiNWs nanocomposites are the potential sensing material for high performance humidity sensors.

Original language	English
Pages (from-to)	144-150
Number of pages	7
Journal	Sensors and Actuators B: Chemical
Volume	136
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2008.10.039
State	Published - 2 Feb 2009
Externally published	Yes

Keywords

Capacitive sensor
Electroless plating
Humidity sensors
Ni/SiNWs nanocomposites

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10.1016/j.snb.2008.10.039

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title = "Capacitive humidity sensors based on Ni/SiNWs nanocomposites",

abstract = "In this paper, Ni/SiNWs nanocomposites, constructed by wet chemical etching silicon nanowires (SiNWs) coated with electroless plating nickel, were prepared and studied for the detection of humidity. The Ni/SiNWs nanocomposites were annealed at different temperatures under argon atmosphere to optimize the sensitive properties and characterized by Energy Dispersive Spectroscopy (EDS) and Scanning Electron Microscopy (SEM) to obtain the information on the structural and morphological properties. The capacitive humidity sensing characteristics have been investigated with the Ni/SiNWs nanocomposites as the sensitive material. It is concluded that the humidity sensor based on as-synthesized nanocomposites exhibited high sensitivity and fast response time due to its unique large surface-to-volume ratio and electrical properties. The results demonstrated that the Ni/SiNWs nanocomposites are the potential sensing material for high performance humidity sensors.",

keywords = "Capacitive sensor, Electroless plating, Humidity sensors, Ni/SiNWs nanocomposites",

author = "Bairui Tao and Jian Zhang and Fengjuan Miao and Huilin Li and Lijuan Wan and Yiting Wang",

year = "2009",

month = feb,

day = "2",

doi = "10.1016/j.snb.2008.10.039",

language = "英语",

volume = "136",

pages = "144--150",

journal = "Sensors and Actuators B: Chemical",

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}

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T1 - Capacitive humidity sensors based on Ni/SiNWs nanocomposites

AU - Tao, Bairui

AU - Zhang, Jian

AU - Miao, Fengjuan

AU - Li, Huilin

AU - Wan, Lijuan

AU - Wang, Yiting

PY - 2009/2/2

Y1 - 2009/2/2

N2 - In this paper, Ni/SiNWs nanocomposites, constructed by wet chemical etching silicon nanowires (SiNWs) coated with electroless plating nickel, were prepared and studied for the detection of humidity. The Ni/SiNWs nanocomposites were annealed at different temperatures under argon atmosphere to optimize the sensitive properties and characterized by Energy Dispersive Spectroscopy (EDS) and Scanning Electron Microscopy (SEM) to obtain the information on the structural and morphological properties. The capacitive humidity sensing characteristics have been investigated with the Ni/SiNWs nanocomposites as the sensitive material. It is concluded that the humidity sensor based on as-synthesized nanocomposites exhibited high sensitivity and fast response time due to its unique large surface-to-volume ratio and electrical properties. The results demonstrated that the Ni/SiNWs nanocomposites are the potential sensing material for high performance humidity sensors.

AB - In this paper, Ni/SiNWs nanocomposites, constructed by wet chemical etching silicon nanowires (SiNWs) coated with electroless plating nickel, were prepared and studied for the detection of humidity. The Ni/SiNWs nanocomposites were annealed at different temperatures under argon atmosphere to optimize the sensitive properties and characterized by Energy Dispersive Spectroscopy (EDS) and Scanning Electron Microscopy (SEM) to obtain the information on the structural and morphological properties. The capacitive humidity sensing characteristics have been investigated with the Ni/SiNWs nanocomposites as the sensitive material. It is concluded that the humidity sensor based on as-synthesized nanocomposites exhibited high sensitivity and fast response time due to its unique large surface-to-volume ratio and electrical properties. The results demonstrated that the Ni/SiNWs nanocomposites are the potential sensing material for high performance humidity sensors.

KW - Capacitive sensor

KW - Electroless plating

KW - Humidity sensors

KW - Ni/SiNWs nanocomposites

UR - https://www.scopus.com/pages/publications/58249128467

U2 - 10.1016/j.snb.2008.10.039

DO - 10.1016/j.snb.2008.10.039

M3 - 文章

AN - SCOPUS:58249128467

SN - 0925-4005

VL - 136

SP - 144

EP - 150

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 1

ER -

Capacitive humidity sensors based on Ni/SiNWs nanocomposites

Abstract

Keywords

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