Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

Fengjuan Miao; Bairui Tao; Li Sun; Tao Liu; Jinchuan You; Lianwei Wang; Paul K. Chu

doi:10.1016/j.sna.2010.03.010

Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

Fengjuan Miao, Bairui Tao, Li Sun, Tao Liu, Jinchuan You, Lianwei Wang, Paul K. Chu

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macroporous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/SiMCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors.

Original language	English
Pages (from-to)	48-53
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	160
Issue number	1-2
DOIs	https://doi.org/10.1016/j.sna.2010.03.010
State	Published - May 2010

Keywords

Electroless plating
Humidity sensors
Nanostructures
Ni/Si-MCP

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10.1016/j.sna.2010.03.010

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title = "Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites",

abstract = "The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macroporous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/SiMCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors.",

keywords = "Electroless plating, Humidity sensors, Nanostructures, Ni/Si-MCP",

author = "Fengjuan Miao and Bairui Tao and Li Sun and Tao Liu and Jinchuan You and Lianwei Wang and Chu, \{Paul K.\}",

year = "2010",

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TY - JOUR

T1 - Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

AU - Miao, Fengjuan

AU - Tao, Bairui

AU - Sun, Li

AU - Liu, Tao

AU - You, Jinchuan

AU - Wang, Lianwei

AU - Chu, Paul K.

PY - 2010/5

Y1 - 2010/5

N2 - The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macroporous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/SiMCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors.

AB - The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macroporous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/SiMCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors.

KW - Electroless plating

KW - Humidity sensors

KW - Nanostructures

KW - Ni/Si-MCP

UR - https://www.scopus.com/pages/publications/77954244407

U2 - 10.1016/j.sna.2010.03.010

DO - 10.1016/j.sna.2010.03.010

M3 - 文章

AN - SCOPUS:77954244407

SN - 0924-4247

VL - 160

SP - 48

EP - 53

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-2

ER -

Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

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Keywords

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