C-V characteristics of Bi₂Ti₂O₇ thin films on n-Si(100)

We report the growth of Bi₂Ti₂O₇ thin films on n-type Si substrates by the chemical solution decomposition technique. Both the X-ray double-crystal diffraction and atomic force micro-spectroscopy measurements are used to check the film properties. It is shown that the film is a multi-crystal film dominated by the Bi₂Ti₂O₇ phase. The C-V measurements are also performed on Au/ Bi₂Ti₂O₇/n-Si(100) MOS structure. It is revealed that both the fixed and mobile negative charges are contained in the film. The mobile negative charge results in the hysteresis loops on C-V curve.