C-axis-oriented growth of anatase TiO2 thin films on glass substrate with SrTiO3/TiN template

Chang Yang; Yasushi Hirose; Shoichiro Nakao; Tetsuya Hasegawa

doi:10.1016/j.jcrysgro.2013.04.050

C-axis-oriented growth of anatase TiO₂ thin films on glass substrate with SrTiO₃/TiN template

Chang Yang, Yasushi Hirose, Shoichiro Nakao, Tetsuya Hasegawa

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Uniaxially c-axis-oriented anatase TiO₂ thin films were prepared on glass substrates using a SrTiO₃/TiN multilayer template. A (100)-oriented TiN layer with a thickness of >100 nm served as a seed to introduce atomic regularity onto the surface of amorphous glass. A SrTiO ₃ buffer layer was used to provide a lattice-matched surface for heteroepitaxy of anatase. X-ray diffraction (XRD) measurements confirmed highly (001)-oriented growth of anatase TiO₂ thin films on this SrTiO ₃/TiN template.

Original language	English
Pages (from-to)	66-69
Number of pages	4
Journal	Journal of Crystal Growth
Volume	376
DOIs	https://doi.org/10.1016/j.jcrysgro.2013.04.050
State	Published - 2013
Externally published	Yes

Keywords

A1. Crystal structure
A3. Oriented growth
A3. Pulsed laser deposition
B1. Anatase titanium dioxide

Access to Document

10.1016/j.jcrysgro.2013.04.050

Cite this

@article{722769f60c5e4378b9c338d407c4cff4,

title = "C-axis-oriented growth of anatase TiO2 thin films on glass substrate with SrTiO3/TiN template",

abstract = "Uniaxially c-axis-oriented anatase TiO2 thin films were prepared on glass substrates using a SrTiO3/TiN multilayer template. A (100)-oriented TiN layer with a thickness of >100 nm served as a seed to introduce atomic regularity onto the surface of amorphous glass. A SrTiO 3 buffer layer was used to provide a lattice-matched surface for heteroepitaxy of anatase. X-ray diffraction (XRD) measurements confirmed highly (001)-oriented growth of anatase TiO2 thin films on this SrTiO 3/TiN template.",

keywords = "A1. Crystal structure, A3. Oriented growth, A3. Pulsed laser deposition, B1. Anatase titanium dioxide",

author = "Chang Yang and Yasushi Hirose and Shoichiro Nakao and Tetsuya Hasegawa",

year = "2013",

doi = "10.1016/j.jcrysgro.2013.04.050",

language = "英语",

volume = "376",

pages = "66--69",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - C-axis-oriented growth of anatase TiO2 thin films on glass substrate with SrTiO3/TiN template

AU - Yang, Chang

AU - Hirose, Yasushi

AU - Nakao, Shoichiro

AU - Hasegawa, Tetsuya

PY - 2013

Y1 - 2013

N2 - Uniaxially c-axis-oriented anatase TiO2 thin films were prepared on glass substrates using a SrTiO3/TiN multilayer template. A (100)-oriented TiN layer with a thickness of >100 nm served as a seed to introduce atomic regularity onto the surface of amorphous glass. A SrTiO 3 buffer layer was used to provide a lattice-matched surface for heteroepitaxy of anatase. X-ray diffraction (XRD) measurements confirmed highly (001)-oriented growth of anatase TiO2 thin films on this SrTiO 3/TiN template.

AB - Uniaxially c-axis-oriented anatase TiO2 thin films were prepared on glass substrates using a SrTiO3/TiN multilayer template. A (100)-oriented TiN layer with a thickness of >100 nm served as a seed to introduce atomic regularity onto the surface of amorphous glass. A SrTiO 3 buffer layer was used to provide a lattice-matched surface for heteroepitaxy of anatase. X-ray diffraction (XRD) measurements confirmed highly (001)-oriented growth of anatase TiO2 thin films on this SrTiO 3/TiN template.

KW - A1. Crystal structure

KW - A3. Oriented growth

KW - A3. Pulsed laser deposition

KW - B1. Anatase titanium dioxide

UR - https://www.scopus.com/pages/publications/84878236925

U2 - 10.1016/j.jcrysgro.2013.04.050

DO - 10.1016/j.jcrysgro.2013.04.050

M3 - 文章

AN - SCOPUS:84878236925

SN - 0022-0248

VL - 376

SP - 66

EP - 69

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -

C-axis-oriented growth of anatase TiO₂ thin films on glass substrate with SrTiO₃/TiN template

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this