Broadband antireflection nanodome structures on SiC substrate

Yiyu Ou; Xiaolong Zhu; Uffe Møller; Sanshui Xiao; Haiyan Ou

doi:10.1109/Group4.2013.6644482

Broadband antireflection nanodome structures on SiC substrate

Yiyu Ou^*
, Xiaolong Zhu
, Uffe Møller
, Sanshui Xiao
, Haiyan Ou

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

Original language	English
Title of host publication	2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013
Pages	39-40
Number of pages	2
DOIs	https://doi.org/10.1109/Group4.2013.6644482
State	Published - 2013
Externally published	Yes
Event	2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013 - Seoul, Korea, Republic of Duration: 28 Aug 2013 → 30 Aug 2013

Publication series

Name	IEEE International Conference on Group IV Photonics GFP
ISSN (Print)	1949-2081

Conference

Conference	2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013
Country/Territory	Korea, Republic of
City	Seoul
Period	28/08/13 → 30/08/13

Keywords

Nanofabrication
sub-wavelength material
surface antireflection

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10.1109/Group4.2013.6644482

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@inproceedings{bad99fa98c484d23ac62a6f1ed68ffe8,

title = "Broadband antireflection nanodome structures on SiC substrate",

abstract = "Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.",

keywords = "Nanofabrication, sub-wavelength material, surface antireflection",

author = "Yiyu Ou and Xiaolong Zhu and Uffe M{\o}ller and Sanshui Xiao and Haiyan Ou",

year = "2013",

doi = "10.1109/Group4.2013.6644482",

language = "英语",

isbn = "9781467358040",

series = "IEEE International Conference on Group IV Photonics GFP",

pages = "39--40",

booktitle = "2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013",

note = "2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013 ; Conference date: 28-08-2013 Through 30-08-2013",

}

Ou, Y, Zhu, X, Møller, U, Xiao, S & Ou, H 2013, Broadband antireflection nanodome structures on SiC substrate. in 2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013., 6644482, IEEE International Conference on Group IV Photonics GFP, pp. 39-40, 2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013, Seoul, Korea, Republic of, 28/08/13. https://doi.org/10.1109/Group4.2013.6644482

Broadband antireflection nanodome structures on SiC substrate. / Ou, Yiyu; Zhu, Xiaolong; Møller, Uffe et al.
2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013. 2013. p. 39-40 6644482 (IEEE International Conference on Group IV Photonics GFP).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Broadband antireflection nanodome structures on SiC substrate

AU - Ou, Yiyu

AU - Zhu, Xiaolong

AU - Møller, Uffe

AU - Xiao, Sanshui

AU - Ou, Haiyan

PY - 2013

Y1 - 2013

N2 - Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

AB - Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.

KW - Nanofabrication

KW - sub-wavelength material

KW - surface antireflection

UR - https://www.scopus.com/pages/publications/84891087551

U2 - 10.1109/Group4.2013.6644482

DO - 10.1109/Group4.2013.6644482

M3 - 会议稿件

AN - SCOPUS:84891087551

SN - 9781467358040

T3 - IEEE International Conference on Group IV Photonics GFP

SP - 39

EP - 40

BT - 2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013

T2 - 2013 IEEE 10th International Conference on Group IV Photonics, GFP 2013

Y2 - 28 August 2013 through 30 August 2013

ER -

Broadband antireflection nanodome structures on SiC substrate

Abstract

Publication series

Conference

Keywords

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