Abstract
Besides reaction-diffusion theory explaining the generation and passivation of interface trap (ΔNIT), hole trapping/de-trapping in preexisting gate insulator traps and transient charge occupancy in ΔNIT are also combined to describe the characteristic of NBTI degradation. However, it is found that H2 locking effect and Electron Fast Capture/Emission play key roles in the NBTI degradation. In this paper, an analytical low frequency AC NBTI compact model has been proposed to accurately predict the shift in threshold voltage. Two fitting parameters (α and FFAST) have been introduced to account for the H2 locking and fast electron capture and emission. The comparison between the proposed model and the experimental data has been carried out, and the results show that our proposed can catch the kinetics of NBTI degradation under low frequency AC stress conditions.
| Original language | English |
|---|---|
| Pages (from-to) | 599-605 |
| Number of pages | 7 |
| Journal | Journal of Electronic Testing: Theory and Applications (JETTA) |
| Volume | 34 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1 Oct 2018 |
Keywords
- Fast electron capture/emission
- H locking effect
- Low frequency
- Negative bias temperature instability (NBTI)
- Reaction diffusion (RD)