Analysis of sigma-delta micro-mechanical accelerometer's parameters

Lv Bingjun; Wang Pengfei; Li Zhi; Liu Xiaowei; Liu Yuntao

doi:10.1109/AISMOT.2011.6159370

Analysis of sigma-delta micro-mechanical accelerometer's parameters

Lv Bingjun, Wang Pengfei, Li Zhi, Liu Xiaowei, Liu Yuntao

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer's performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.

Original language	English
Title of host publication	2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011
Pages	267-271
Number of pages	5
DOIs	https://doi.org/10.1109/AISMOT.2011.6159370
State	Published - 2011
Externally published	Yes
Event	2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011 - Harbin, China Duration: 12 Oct 2011 → 16 Oct 2011

Publication series

Name	2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011

Conference

Conference	2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011
Country/Territory	China
City	Harbin
Period	12/10/11 → 16/10/11

Keywords

Compensation coefficient
Input signal
Micro-accelerometer
Resonant frequency
Sigma-delta

Access to Document

10.1109/AISMOT.2011.6159370

Cite this

Bingjun, L., Pengfei, W., Zhi, L., Xiaowei, L., & Yuntao, L. (2011). Analysis of sigma-delta micro-mechanical accelerometer's parameters. In 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011 (pp. 267-271). Article 6159370 (2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011). https://doi.org/10.1109/AISMOT.2011.6159370

@inproceedings{65a42d39ec1d4c0f97b647a3ef6d016d,

title = "Analysis of sigma-delta micro-mechanical accelerometer's parameters",

abstract = "Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer's performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.",

keywords = "Compensation coefficient, Input signal, Micro-accelerometer, Resonant frequency, Sigma-delta",

author = "Lv Bingjun and Wang Pengfei and Li Zhi and Liu Xiaowei and Liu Yuntao",

year = "2011",

doi = "10.1109/AISMOT.2011.6159370",

language = "英语",

isbn = "9781457707964",

series = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011",

pages = "267--271",

booktitle = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011",

note = "2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011 ; Conference date: 12-10-2011 Through 16-10-2011",

}

Bingjun, L, Pengfei, W, Zhi, L, Xiaowei, L & Yuntao, L 2011, Analysis of sigma-delta micro-mechanical accelerometer's parameters. in 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011., 6159370, 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, pp. 267-271, 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, Harbin, China, 12/10/11. https://doi.org/10.1109/AISMOT.2011.6159370

Analysis of sigma-delta micro-mechanical accelerometer's parameters. / Bingjun, Lv; Pengfei, Wang; Zhi, Li et al.
2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011. 2011. p. 267-271 6159370 (2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Analysis of sigma-delta micro-mechanical accelerometer's parameters

AU - Bingjun, Lv

AU - Pengfei, Wang

AU - Zhi, Li

AU - Xiaowei, Liu

AU - Yuntao, Liu

PY - 2011

Y1 - 2011

N2 - Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer's performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.

AB - Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer's performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.

KW - Compensation coefficient

KW - Input signal

KW - Micro-accelerometer

KW - Resonant frequency

KW - Sigma-delta

UR - https://www.scopus.com/pages/publications/84858720570

U2 - 10.1109/AISMOT.2011.6159370

DO - 10.1109/AISMOT.2011.6159370

M3 - 会议稿件

AN - SCOPUS:84858720570

SN - 9781457707964

T3 - 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011

SP - 267

EP - 271

BT - 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011

T2 - 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011

Y2 - 12 October 2011 through 16 October 2011

ER -

Bingjun L, Pengfei W, Zhi L, Xiaowei L, Yuntao L. Analysis of sigma-delta micro-mechanical accelerometer's parameters. In 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011. 2011. p. 267-271. 6159370. (2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011). doi: 10.1109/AISMOT.2011.6159370

Analysis of sigma-delta micro-mechanical accelerometer's parameters

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