An approach for determining equivalent circuit model of on-chip inductors

A parameter-extraction approach for the spiral on-chip inductors, which combines the analytical approach and the empirical optimization procedure, is developed in this article. The model parameters determined from the analytical expressions are considered as an initial guess of a subsequent optimization procedure leading to the final model parameters. Scaling rule for the inductances of spiral on-chip inductors has been developed, and very useful for predicting the performance of the on-chip inductors with larger size. Good agreement is obtained between simulated and measured results for the spiral inductors with different size on silicon in the frequency range of 500 MHz-40 GHz.