Advancing integrated photonics and microreactor technologies with ultrafast laser processing

  • Min Wang
  • , Zhiwei Fang
  • , Jia Qi
  • , Junxia Zhou
  • , Zhe Wang
  • , Rongbo Wu
  • , Renhong Gao
  • , Ni Yao
  • , Sanaul Haque
  • , Saeed Farajollahi
  • , Jintian Lin
  • , Wei Fang
  • , Tao Lu
  • , Wei Chu
  • , Ya Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.

Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI
EditorsCarlos Molpeceres, Jie Qiao, Aiko Narazaki
PublisherSPIE
ISBN (Electronic)9781510641815
DOIs
StatePublished - 2021
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021 - Virtual, Online, United States
Duration: 6 Mar 202111 Mar 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11673
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021
Country/TerritoryUnited States
CityVirtual, Online
Period6/03/2111/03/21

Keywords

  • Amplifier
  • Lithium niobate on insulator
  • Micro-reactor
  • Microresonator
  • Ultrafast laser processing

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