@inproceedings{13054ebda2b64a35bccda4bf700b8984,
title = "Advanced methodologies for atomic-scale nanofabrication and dynamic characterization",
abstract = "Based on the idea of 'setting up a nanolab inside a transmission electron microscopy (TEM)', we review our recent progress in atomic resolution nanofabrication and dynamic characterization of individual nanostructures and nanodevices. The electron beam can be used as a tool to induce nanofabrication on the atomic scale. Additional probes from a special-designed holder provide the possibility to further manipulate and measure the electrical properties of the nanostructures. All phenomena from the in-situ TEM experiments can be recorded in real time with atomic resolution.",
keywords = "Dynamic characterization, Nanodevice, Nanofabrication, Transmission electron microscopy",
author = "Xing Wu and Litao Sun",
year = "2013",
doi = "10.1109/IPFA.2013.6599188",
language = "英语",
isbn = "9781479912414",
series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",
pages = "393--399",
booktitle = "Proceedings of the 2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2013",
note = "2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2013 ; Conference date: 15-07-2013 Through 19-07-2013",
}