Advanced methodologies for atomic-scale nanofabrication and dynamic characterization

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Based on the idea of 'setting up a nanolab inside a transmission electron microscopy (TEM)', we review our recent progress in atomic resolution nanofabrication and dynamic characterization of individual nanostructures and nanodevices. The electron beam can be used as a tool to induce nanofabrication on the atomic scale. Additional probes from a special-designed holder provide the possibility to further manipulate and measure the electrical properties of the nanostructures. All phenomena from the in-situ TEM experiments can be recorded in real time with atomic resolution.

Original languageEnglish
Title of host publicationProceedings of the 2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2013
Pages393-399
Number of pages7
DOIs
StatePublished - 2013
Externally publishedYes
Event2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2013 - Suzhou, China
Duration: 15 Jul 201319 Jul 2013

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Conference

Conference2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2013
Country/TerritoryChina
CitySuzhou
Period15/07/1319/07/13

Keywords

  • Dynamic characterization
  • Nanodevice
  • Nanofabrication
  • Transmission electron microscopy

Fingerprint

Dive into the research topics of 'Advanced methodologies for atomic-scale nanofabrication and dynamic characterization'. Together they form a unique fingerprint.

Cite this