Abstract
Three kinds of advanced technologies using lasers for glass microprocessing are reviewed. Simultaneous irradiation of vacuum ultraviolet (VUV) laser beam, which possesses extremely small laser fluence, with ultraviolet (UV) laser achieves enhanced high surface and edge quality ablation in fused silica and other hard materials with little debris deposition as well as high-speed and high-efficiency refractive index modification of fused silica (VUV-UV multiwavelength excitation processing). Metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials, resulting in surface microstructuring, high-speed holes drilling, crack-free marking, color marking, painting and metal interconnection for the various kinds of glass materials (laser-induced plasma-assisted ablation (LIPAA)). In the meanwhile, a nature of multiphoton absorption of femtosecond laser by transparent materials realizes fabrication of true three-dimensional microstructures embedded in photosensitive glass.
| Original language | English |
|---|---|
| Pages (from-to) | 232-242 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5121 |
| DOIs | |
| State | Published - 2002 |
| Externally published | Yes |
| Event | PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: International Conference on Lasers, Applications, and Technologies 2002 Laser Processing of Advanced Materials and Laser Microtechnologies - Moscow, Russian Federation Duration: 22 Jun 2002 → 27 Jun 2002 |
Keywords
- 3D microstructure
- Ablation
- F2 laser
- Femtosecond laser
- Fused silica
- Glass
- Internal modification
- Laser-induced plasma
- Micromachining
- Multiwavelength excitation
Fingerprint
Dive into the research topics of 'Advanced laser processing of glass materials'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver