Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Y. Cheng; K. Sugioka; M. Masuda; M. Kawachi; K. Shihoyama; K. Toyoda; K. Midorikawa

doi:10.1117/12.486586

Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Y. Cheng^*
, K. Sugioka
, M. Masuda
, M. Kawachi
, K. Shihoyama
, K. Toyoda
, K. Midorikawa

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Abstract

Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.

Original language	English
Pages (from-to)	479-483
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4830
DOIs	https://doi.org/10.1117/12.486586
State	Published - 2002
Externally published	Yes
Event	Third International Symposium on Laser Precision Microfabrication - Osaka, Japan Duration: 27 May 2002 → 31 May 2002

Keywords

3D microfabrication
Aspect ratio
Femtosecond laser
Micro fluidic device
Photosensitive glass
μ-TAS

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10.1117/12.486586

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title = "Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials",

abstract = "Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.",

keywords = "3D microfabrication, Aspect ratio, Femtosecond laser, Micro fluidic device, Photosensitive glass, μ-TAS",

author = "Y. Cheng and K. Sugioka and M. Masuda and M. Kawachi and K. Shihoyama and K. Toyoda and K. Midorikawa",

year = "2002",

doi = "10.1117/12.486586",

language = "英语",

volume = "4830",

pages = "479--483",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "Third International Symposium on Laser Precision Microfabrication ; Conference date: 27-05-2002 Through 31-05-2002",

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TY - JOUR

T1 - Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

AU - Cheng, Y.

AU - Sugioka, K.

AU - Masuda, M.

AU - Kawachi, M.

AU - Shihoyama, K.

AU - Toyoda, K.

AU - Midorikawa, K.

PY - 2002

Y1 - 2002

N2 - Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.

AB - Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.

KW - 3D microfabrication

KW - Aspect ratio

KW - Femtosecond laser

KW - Micro fluidic device

KW - Photosensitive glass

KW - μ-TAS

UR - https://www.scopus.com/pages/publications/0037959996

U2 - 10.1117/12.486586

DO - 10.1117/12.486586

M3 - 会议文章

AN - SCOPUS:0037959996

SN - 0277-786X

VL - 4830

SP - 479

EP - 483

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Third International Symposium on Laser Precision Microfabrication

Y2 - 27 May 2002 through 31 May 2002

ER -

Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Abstract

Keywords

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