Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 μm and 9 mm without any aberration correction.