A spectrally selective visible microbolometer based on planar subwavelength thin films

Qianqian Xu, Ziji Zhou, Chong Tan, Xiaohang Pan, Zhengji Wen, Jinguo Zhang, Dongjie Zhou, Yan Sun, Xin Chen, Lei Zhou, Ning Dai, Junhao Chu, Jiaming Hao

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

In this work, we experimentally demonstrate a new type of compact, low-cost, visible microbolometer based on metal-insulator-metal (MIM) planar subwavelength thin films, which exploits resonant absorption for spectral selectivity without additional filters and has the advantages of compact design, simple structure, cost-efficiency, and large format fabrication. The experimental results show that a proof-of-principle microbolometer exhibits spectrally selective properties in the visible frequency range. At a resonant absorption wavelength of 638 nm, a responsivity of about 10 mV W−1 is achieved at room temperature at a bias current of 0.2 mA, which is about one order of magnitude higher than that of the control device (a bare Au bolometer). Our proposed approach provides a viable solution for the development of compact and inexpensive detectors.

Original languageEnglish
Pages (from-to)2054-2060
Number of pages7
JournalNanoscale Advances
Volume5
Issue number7
DOIs
StatePublished - 23 Feb 2023
Externally publishedYes

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