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A spectrally selective visible microbolometer based on planar subwavelength thin films

  • Qianqian Xu
  • , Ziji Zhou
  • , Chong Tan
  • , Xiaohang Pan
  • , Zhengji Wen
  • , Jinguo Zhang
  • , Dongjie Zhou
  • , Yan Sun
  • , Xin Chen
  • , Lei Zhou
  • , Ning Dai
  • , Junhao Chu
  • , Jiaming Hao*
  • *Corresponding author for this work
  • CAS - Shanghai Institute of Technical Physics
  • University of Chinese Academy of Sciences
  • Fudan University

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we experimentally demonstrate a new type of compact, low-cost, visible microbolometer based on metal-insulator-metal (MIM) planar subwavelength thin films, which exploits resonant absorption for spectral selectivity without additional filters and has the advantages of compact design, simple structure, cost-efficiency, and large format fabrication. The experimental results show that a proof-of-principle microbolometer exhibits spectrally selective properties in the visible frequency range. At a resonant absorption wavelength of 638 nm, a responsivity of about 10 mV W−1 is achieved at room temperature at a bias current of 0.2 mA, which is about one order of magnitude higher than that of the control device (a bare Au bolometer). Our proposed approach provides a viable solution for the development of compact and inexpensive detectors.

Original languageEnglish
Pages (from-to)2054-2060
Number of pages7
JournalNanoscale Advances
Volume5
Issue number7
DOIs
StatePublished - 23 Feb 2023
Externally publishedYes

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