A quartz tuning fork-based humidity sensor using nanocrystalline zinc oxide thin film coatings

Xiaofeng Zhou; Tao Jiang; Jian Zhang; Jianzhong Zhu; Xiaohua Wang; Ziqiang Zhu

doi:10.1109/ICIA.2006.305908

A quartz tuning fork-based humidity sensor using nanocrystalline zinc oxide thin film coatings

Xiaofeng Zhou
, Tao Jiang
, Jian Zhang^*
, Jianzhong Zhu
, Xiaohua Wang
, Ziqiang Zhu

^*Corresponding author for this work

School of Communication and Electronic Engineering

East China Normal University

Research output: Contribution to conference › Paper › peer-review

3 Scopus citations

Abstract

This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability,fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF.

Original language	English
Pages	1152-1157
Number of pages	6
DOIs	https://doi.org/10.1109/ICIA.2006.305908
State	Published - 2006
Event	2006 IEEE International Conference on Information Acquisition, ICIA 2006 - Weihai, Shandong, China Duration: 20 Aug 2006 → 23 Aug 2006

Conference

Conference	2006 IEEE International Conference on Information Acquisition, ICIA 2006
Country/Territory	China
City	Weihai, Shandong
Period	20/08/06 → 23/08/06

Keywords

Humidity sensor
Quartz tuning fork
Relative humidity
Sol-gel
Zinc oxide thin film

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10.1109/ICIA.2006.305908

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title = "A quartz tuning fork-based humidity sensor using nanocrystalline zinc oxide thin film coatings",

abstract = "This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability,fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF.",

keywords = "Humidity sensor, Quartz tuning fork, Relative humidity, Sol-gel, Zinc oxide thin film",

author = "Xiaofeng Zhou and Tao Jiang and Jian Zhang and Jianzhong Zhu and Xiaohua Wang and Ziqiang Zhu",

year = "2006",

doi = "10.1109/ICIA.2006.305908",

language = "英语",

pages = "1152--1157",

note = "2006 IEEE International Conference on Information Acquisition, ICIA 2006 ; Conference date: 20-08-2006 Through 23-08-2006",

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T1 - A quartz tuning fork-based humidity sensor using nanocrystalline zinc oxide thin film coatings

AU - Zhou, Xiaofeng

AU - Jiang, Tao

AU - Zhang, Jian

AU - Zhu, Jianzhong

AU - Wang, Xiaohua

AU - Zhu, Ziqiang

PY - 2006

Y1 - 2006

N2 - This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability,fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF.

AB - This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability,fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF.

KW - Humidity sensor

KW - Quartz tuning fork

KW - Relative humidity

KW - Sol-gel

KW - Zinc oxide thin film

UR - https://www.scopus.com/pages/publications/46249129059

U2 - 10.1109/ICIA.2006.305908

DO - 10.1109/ICIA.2006.305908

M3 - 论文

AN - SCOPUS:46249129059

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T2 - 2006 IEEE International Conference on Information Acquisition, ICIA 2006

Y2 - 20 August 2006 through 23 August 2006

ER -

A quartz tuning fork-based humidity sensor using nanocrystalline zinc oxide thin film coatings

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