TY - GEN
T1 - A piezoelectric micro-actuator with three dimensional structure and its micro-fabrication
AU - Gao, Peng
AU - Yao, Kui
AU - Tang, Xiaosong
AU - He, Xujiang
AU - Shannigrahi, Santiranjan
AU - Lou, Yaolong
AU - Zhang, Jian
AU - Okada, Kanzo
PY - 2005
Y1 - 2005
N2 - Piezoelectric micro actuators and motors are promising for the applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an "H-shaped" cavity and a pair of high-aspect-ratio parallel beams, was designed. The micro-actuator with the three dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate materials processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro machining, wafer bonding, and integration of piezoelectric thin films. The performance evaluation of the obtained micro-actuator samples was also conducted. The results demonstrate that a combination of silicon micro fabrication and piezoelectric thin films is a viable approach to develop miniaturized piezoelectric devices with a complex structure.
AB - Piezoelectric micro actuators and motors are promising for the applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an "H-shaped" cavity and a pair of high-aspect-ratio parallel beams, was designed. The micro-actuator with the three dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate materials processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro machining, wafer bonding, and integration of piezoelectric thin films. The performance evaluation of the obtained micro-actuator samples was also conducted. The results demonstrate that a combination of silicon micro fabrication and piezoelectric thin films is a viable approach to develop miniaturized piezoelectric devices with a complex structure.
KW - Micro-actuator
KW - Micro-fabrication
KW - Piezoelectric thin film
KW - Wafer-bonding
UR - https://www.scopus.com/pages/publications/27544472761
M3 - 会议稿件
AN - SCOPUS:27544472761
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 713
EP - 716
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -