A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao; Fei He; Chen Wang; Ya Cheng; Koji Sugioka; Katsumi Midorikawa

doi:10.1007/s00339-010-6096-z

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao, Fei He, Chen Wang, Ya Cheng, Koji Sugioka, Katsumi Midorikawa

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

Original language	English
Pages (from-to)	179-183
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	102
Issue number	1
DOIs	https://doi.org/10.1007/s00339-010-6096-z
State	Published - Jan 2011
Externally published	Yes

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title = "A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining",

abstract = "We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.",

author = "Lingling Qiao and Fei He and Chen Wang and Ya Cheng and Koji Sugioka and Katsumi Midorikawa",

year = "2011",

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doi = "10.1007/s00339-010-6096-z",

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AU - Qiao, Lingling

AU - He, Fei

AU - Wang, Chen

AU - Cheng, Ya

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

PY - 2011/1

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N2 - We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

AB - We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

UR - https://www.scopus.com/pages/publications/79551681286

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JO - Applied Physics A: Materials Science and Processing

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IS - 1

ER -

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

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