A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

Jian Mao; Lufeng Che; Youling Lin; Yufang Li; Xiaofeng Zhou; Bin Xiong; Yuelin Wang

A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

Jian Mao, Lufeng Che, Youling Lin, Yufang Li, Xiaofeng Zhou, Bin Xiong, Yuelin Wang

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

Original language	English
Pages (from-to)	143-146
Number of pages	4
Journal	Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics
Volume	29
Issue number	1
State	Published - Mar 2009
Externally published	Yes

Keywords

Capacitive accelerometer
Capacitor gap control
Silicon-silicon bonding
Wafer-level vacuum package

Cite this

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title = "A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap",

abstract = "This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.",

keywords = "Capacitive accelerometer, Capacitor gap control, Silicon-silicon bonding, Wafer-level vacuum package",

author = "Jian Mao and Lufeng Che and Youling Lin and Yufang Li and Xiaofeng Zhou and Bin Xiong and Yuelin Wang",

year = "2009",

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T1 - A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

AU - Mao, Jian

AU - Che, Lufeng

AU - Lin, Youling

AU - Li, Yufang

AU - Zhou, Xiaofeng

AU - Xiong, Bin

AU - Wang, Yuelin

PY - 2009/3

Y1 - 2009/3

N2 - This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

AB - This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g, the resonance frequency of 657 Hz and the quality factor of 198.

KW - Capacitive accelerometer

KW - Capacitor gap control

KW - Silicon-silicon bonding

KW - Wafer-level vacuum package

UR - https://www.scopus.com/pages/publications/64049090950

M3 - 文章

AN - SCOPUS:64049090950

SN - 1000-3819

VL - 29

SP - 143

EP - 146

JO - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

JF - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

IS - 1

ER -

A fully symmetrical capacitive accelerometer with precisely controllable capacitor gap

Abstract

Keywords

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