128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique

Shao Wei Wang; Ming Li; Changsheng Xia; Haiqian Wang; Xiaoshuang Chen; Wei Lu

doi:10.1109/ICIMW.2006.368558

128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique

Shao Wei Wang^*, Ming Li, Changsheng Xia, Haiqian Wang, Xiaoshuang Chen, Wei Lu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0nm. Their relative bandwidth is smaller than 0.44%.

Original language	English
Title of host publication	IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics
Pages	350
Number of pages	1
DOIs	https://doi.org/10.1109/ICIMW.2006.368558
State	Published - 2006
Externally published	Yes
Event	IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics - Shanghai, China Duration: 18 Sep 2006 → 22 Sep 2006

Publication series

Name	IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics

Conference

Conference	IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics
Country/Territory	China
City	Shanghai
Period	18/09/06 → 22/09/06

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10.1109/ICIMW.2006.368558

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Wang, S. W., Li, M., Xia, C., Wang, H., Chen, X., & Lu, W. (2006). 128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique. In IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics (pp. 350). Article 4222292 (IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics). https://doi.org/10.1109/ICIMW.2006.368558

Wang, Shao Wei ; Li, Ming ; Xia, Changsheng et al. / 128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique. IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics. 2006. pp. 350 (IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics).

@inproceedings{3c8e9867dea4421f8fc50446ca3f9d58,

title = "128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique",

abstract = "A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0nm. Their relative bandwidth is smaller than 0.44\%.",

author = "Wang, \{Shao Wei\} and Ming Li and Changsheng Xia and Haiqian Wang and Xiaoshuang Chen and Wei Lu",

year = "2006",

doi = "10.1109/ICIMW.2006.368558",

language = "英语",

isbn = "1424404002",

series = "IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics",

pages = "350",

booktitle = "IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics",

note = "IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics ; Conference date: 18-09-2006 Through 22-09-2006",

}

Wang, SW, Li, M, Xia, C, Wang, H, Chen, X & Lu, W 2006, 128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique. in IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics., 4222292, IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics, pp. 350, IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics, Shanghai, China, 18/09/06. https://doi.org/10.1109/ICIMW.2006.368558

128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique. / Wang, Shao Wei; Li, Ming; Xia, Changsheng et al.
IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics. 2006. p. 350 4222292 (IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique

AU - Wang, Shao Wei

AU - Li, Ming

AU - Xia, Changsheng

AU - Wang, Haiqian

AU - Chen, Xiaoshuang

AU - Lu, Wei

PY - 2006

Y1 - 2006

N2 - A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0nm. Their relative bandwidth is smaller than 0.44%.

AB - A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0nm. Their relative bandwidth is smaller than 0.44%.

UR - https://www.scopus.com/pages/publications/51449114675

U2 - 10.1109/ICIMW.2006.368558

DO - 10.1109/ICIMW.2006.368558

M3 - 会议稿件

AN - SCOPUS:51449114675

SN - 1424404002

SN - 9781424404001

T3 - IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics

SP - 350

BT - IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics

T2 - IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics

Y2 - 18 September 2006 through 22 September 2006

ER -

Wang SW, Li M, Xia C, Wang H, Chen X, Lu W. 128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique. In IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics. 2006. p. 350. 4222292. (IRMMW-THz 2006 - 31st International Conference on Infrared and Millimeter Waves and 14th International Conference on Terahertz Electronics). doi: 10.1109/ICIMW.2006.368558

128 Channels of integrated filter array in the NIR region fabricated by using the combinatorial deposition technique

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