等离子体处理制备柔性低损耗 ABS/Ag 太赫兹空芯波导及其传输可靠性研究

The performance of ABS/Ag-coated terahertz hollow waveguide（HWG）was improved through plasma treatment of the ABS structural tube. The adhesion of the silver（Ag）film to the ABS tube was enhanced from level 5 to level 2 after plasma treatment. The 4. 2 mm bore waveguide sample treated with plasma has a more uniform and denser silver film than the untreated sample，which contributes to the reduction of transmission losses from 0. 72 dB/m to 0. 70 dB/m at 0. 3 THz and 1. 47 dB/m to 1. 44 dB/m at 0. 1 THz，respectively. After 200 hours of hydrothermal aging and 16 cycles of high and low temperature cycling testing，the straight loss of the HWG sample treated with plasma increased by less than 0. 1 dB/m，while the untreated sample underwent an increase of more than 1. 0 dB/m. The results indicate that the ABS/Ag-coated HWG fabricated by plasma treatment has lower loss，higher reliability and better anti-aging performance compared with the untreated sample. It can be potentially used for establishment of next-generation communication，sensing，and THz imaging systems.