基 于 超 高 灵 敏 度 压 电 单 晶 振 动 传 感 器 的光 学 平 台 微 弱 振 动 检 测

Yuanhang Li; Litang Zeng; Zhanjiang Gong; Likai Sun; Erdong Song; Jie Jiao; Anran Gao

doi:10.11977/j.issn.1004-2474.2026.02.015

基于超高灵敏度压电单晶振动传感器的光学平台微弱振动检测

Translated title of the contribution: Vibration Monitoring of Optical Platforms Based on Ultra-High Sensitivity Piezoelectric Single-Crystal Accelerometers

Yuanhang Li
, Litang Zeng
, Zhanjiang Gong
, Likai Sun
, Erdong Song
, Jie Jiao
, Anran Gao

School of Physics and Electronic Science

East China Normal University
A Unit of the Chinese People's Liberation Army
China Electronics Technology Group Corporation
CAS - Shanghai Institute of Ceramics

Research output: Contribution to journal › Article › peer-review

Abstract

To address the limitations of commercially available vibration sensors—specifically，their insufficient sensitivity and excessive noise levels for detecting micro-vibrations—we developed an accelerometer utilizing PMN-PT piezoelectric single crystals with high piezoelectric coefficients. Experimental results demonstrate that the proposed sensor is capable of detecting weak vibrations with amplitudes below 0. 08 mrad at a frequency of 5 Hz. Under these measurement conditions，the signal-to-noise ratio（SNR）remains as high as 12. 5 dB，demonstrating its effective responsiveness to extremely weak vibrations. This study provides a novel approach for high-precision vibration detection in optical platform systems.

Translated title of the contribution	Vibration Monitoring of Optical Platforms Based on Ultra-High Sensitivity Piezoelectric Single-Crystal Accelerometers
Original language	Chinese (Traditional)
Pages (from-to)	309-315
Number of pages	7
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	48
Issue number	2
DOIs	https://doi.org/10.11977/j.issn.1004-2474.2026.02.015
State	Published - Apr 2026

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10.11977/j.issn.1004-2474.2026.02.015

Cite this

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title = "基于超高灵敏度压电单晶振动传感器的光学平台微弱振动检测",

abstract = "To address the limitations of commercially available vibration sensors—specifically，their insufficient sensitivity and excessive noise levels for detecting micro-vibrations—we developed an accelerometer utilizing PMN-PT piezoelectric single crystals with high piezoelectric coefficients. Experimental results demonstrate that the proposed sensor is capable of detecting weak vibrations with amplitudes below 0. 08 mrad at a frequency of 5 Hz. Under these measurement conditions，the signal-to-noise ratio（SNR）remains as high as 12. 5 dB，demonstrating its effective responsiveness to extremely weak vibrations. This study provides a novel approach for high-precision vibration detection in optical platform systems.",

keywords = "PM N-PT, accelerometers, active vibration isolation, piezoelectric single crystal, vibration measurement",

author = "Yuanhang Li and Litang Zeng and Zhanjiang Gong and Likai Sun and Erdong Song and Jie Jiao and Anran Gao",

year = "2026",

month = apr,

doi = "10.11977/j.issn.1004-2474.2026.02.015",

language = "繁体中文",

volume = "48",

pages = "309--315",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

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publisher = "Sichuan Institute of Piezoelectric and Acoustooptic Technology",

number = "2",

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T1 - 基于超高灵敏度压电单晶振动传感器的光学平台微弱振动检测

AU - Li, Yuanhang

AU - Zeng, Litang

AU - Gong, Zhanjiang

AU - Sun, Likai

AU - Song, Erdong

AU - Jiao, Jie

AU - Gao, Anran

PY - 2026/4

Y1 - 2026/4

N2 - To address the limitations of commercially available vibration sensors—specifically，their insufficient sensitivity and excessive noise levels for detecting micro-vibrations—we developed an accelerometer utilizing PMN-PT piezoelectric single crystals with high piezoelectric coefficients. Experimental results demonstrate that the proposed sensor is capable of detecting weak vibrations with amplitudes below 0. 08 mrad at a frequency of 5 Hz. Under these measurement conditions，the signal-to-noise ratio（SNR）remains as high as 12. 5 dB，demonstrating its effective responsiveness to extremely weak vibrations. This study provides a novel approach for high-precision vibration detection in optical platform systems.

AB - To address the limitations of commercially available vibration sensors—specifically，their insufficient sensitivity and excessive noise levels for detecting micro-vibrations—we developed an accelerometer utilizing PMN-PT piezoelectric single crystals with high piezoelectric coefficients. Experimental results demonstrate that the proposed sensor is capable of detecting weak vibrations with amplitudes below 0. 08 mrad at a frequency of 5 Hz. Under these measurement conditions，the signal-to-noise ratio（SNR）remains as high as 12. 5 dB，demonstrating its effective responsiveness to extremely weak vibrations. This study provides a novel approach for high-precision vibration detection in optical platform systems.

KW - PM N-PT

KW - accelerometers

KW - active vibration isolation

KW - piezoelectric single crystal

KW - vibration measurement

UR - https://www.scopus.com/pages/publications/105039291817

U2 - 10.11977/j.issn.1004-2474.2026.02.015

DO - 10.11977/j.issn.1004-2474.2026.02.015

M3 - 文章

AN - SCOPUS:105039291817

SN - 1004-2474

VL - 48

SP - 309

EP - 315

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 2

ER -

基于超高灵敏度压电单晶振动传感器的光学平台微弱振动检测

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基 于 超 高 灵 敏 度 压 电 单 晶 振 动 传 感 器 的光 学 平 台 微 弱 振 动 检 测

Abstract

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基于超高灵敏度压电单晶振动传感器的光学平台微弱振动检测