基于整形飞秒激光脉冲的三维微纳制备

Lingling Qiao; Wei Chu; Zhe Wang; Ya Cheng

doi:10.3788/AOS201939.0126012

基于整形飞秒激光脉冲的三维微纳制备

Translated title of the contribution: Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng

School of Physics and Electronic Science

Research output: Contribution to journal › Review article › peer-review

13 Scopus citations

Abstract

Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.

Translated title of the contribution	Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses
Original language	Chinese (Traditional)
Article number	0126012
Journal	Guangxue Xuebao/Acta Optica Sinica
Volume	39
Issue number	1
DOIs	https://doi.org/10.3788/AOS201939.0126012
State	Published - 10 Jan 2019

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abstract = "Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.",

keywords = "Femtosecond laser, Micromachining, Optical devices, Physical optics, Pulse shaping",

author = "Lingling Qiao and Wei Chu and Zhe Wang and Ya Cheng",

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T1 - 基于整形飞秒激光脉冲的三维微纳制备

AU - Qiao, Lingling

AU - Chu, Wei

AU - Wang, Zhe

AU - Cheng, Ya

PY - 2019/1/10

Y1 - 2019/1/10

N2 - Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.

AB - Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.

KW - Femtosecond laser

KW - Micromachining

KW - Optical devices

KW - Physical optics

KW - Pulse shaping

UR - https://www.scopus.com/pages/publications/85063038711

U2 - 10.3788/AOS201939.0126012

DO - 10.3788/AOS201939.0126012

M3 - 文献综述

AN - SCOPUS:85063038711

SN - 0253-2239

VL - 39

JO - Guangxue Xuebao/Acta Optica Sinica

JF - Guangxue Xuebao/Acta Optica Sinica

IS - 1

M1 - 0126012

ER -

基于整形飞秒激光脉冲的三维微纳制备

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