Abstract
In combination of inkjet-printed carbon masking and surface modification of ion-exchange method(SMIE)techniques,silver interdigitated electrode for sensor and the resistors for heating were fabricated on different sides of the polyimide substrate subsequently. The controlled temperature,ranging from 25 ℃ to 280 ℃,can be realized by adjusting the DC bias voltage across the resistive heater. The integrated heater offered twofold functions:ZnO sensing film in situ deposition and elevated temperature detection. With the aid of heater,the ZnO sensing films composed of nanoparticles were first in situ deposited. The heater introduction can obviously improve the sensor performance. The results indicated that the sensitivity increased monotonically with temperature(<150 ℃). Since the acetone desorption on sensor surface had been facilitated,the sensor had the shortened response and recovery time,and the initial resistance drift is also tolerable. In addition,the heater can effectively reduce the interference from humidity during the acetone detection.
| Translated title of the contribution | Fully Inkjet-Printed Acetone Gas Sensors on Flexible Substrates with Integrated Heater for Sensing Material in-situ Deposition and Elevated Temperature Detection |
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| Original language | Chinese (Traditional) |
| Pages (from-to) | 502-506 |
| Number of pages | 5 |
| Journal | Chinese Journal of Sensors and Actuators |
| Volume | 31 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1 Apr 2018 |